Four Point Probes Division
PO Box 9275, Chandler Heights AZ, 85127, USA Tel: (480) 988-2256 Fax: (480) 452-0172 E-mail: sales@bridgetec.com

Mini Rapid Thermal Evaporator

Mini Rapid Thermal Evaporator

Mini Rapid Thermal Evaporator

Model No : M/N : AP-MTE1

A. Feature of Thermal Evaporation System

  • Deposition thickness : Customer specified
  • Deposition material : Metals films
  • Film thickness uniformity : = ± 5 % on 4" substrate
  • Deposition : deposition by Thermal evaporation boat
  • Throughput : up to 4" substrate x 1 sheet / batch
  • Vacuum : Ultimate pressure 5.0 x 10 -6 Torr / Base pressure 3.0 x 10-5 Torr
  • Vacuum chamber : process chamber
  • Control system : Manual control
  • Purpose : Research and development

B. Specifications

1. Vacuum chamber module

1) Process chamber

  • Chamber : stainless steel body with a hinged top door type, ID250 x H300 mm
  • Ports : Pumping, venting, gauge, window, thermal boat, valves, etc.

2) Substrate holder module

  • Substrate holder for 4 inch substrate
  • Sample (un)loading : Manual
  • Substrate rotation : 0~10RPM (Option 1)

2. Vacuum module

1) Vacuum pumps

  • Oil rotary pump (150 l/min) 1set, Oil Diffusion pump (215 l/sec) 1set

2) Vacuum valves and pumping lines

  • Right angle valve for Oil Diffusion pump
  • NW25, Right angle valve for Roughing pumping
  • Venting valve, Pumping lines(NW25), etc.

3) Vacuum measurement

  • Low vacuum gauge sensor, 1set
  • High vacuum gauge sensor, 1set

4) Thickness Monitoring Unit (Option 2)

  • Quartz oscillator type deposition controller
  • Sensor packages
  • Vacuum feedthroughs
  • Thickness display range : 0 to 999.9 k Å
  • Thickness accuracy : 0.5 %
  • E-beam gun control : user programmable
  • Parameters are displayed on screen
  • Delivered with 10 crystals for sensor head

3. Thermal evaporation source module

  • 4" x 1 boats (W boat)
  • AC power supply
  • Output power : 5 V - 400 A
  • Analog current limit control on front panel
  • Boat thermal deposition control
  • Manual shutter

4. Frame

  • Frame size : 650(W) x 900(D) x 900(H) mm
  • Painted profiled mild steel
  • The whole machine is covered with paint removable panels
  • The frame is also equipped with adjustable legs

5. Facilities (Customer side)

  • Water flow system with purging valve
  • Electric power requirements : AC 220V, 20A (about max. 4kW)
  • Exhaust line NW25 for roughing pump

C. Warranty

  • During one-year period, Manufacturer warrants for repair all faulty equipment without charge except that improper operation, maintenance and handling by the customer.
  • All consumable materials are entirely excluded from warranty.

D. Delivery

  • Normally 8 weeks after PO