Serving Arizona, Colorado, New Mexico, and Utah.
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Process Chamber Assurance Tool (CAT)
The CAT uses Rate of Rise methodology and applies the gas laws to test vacuum
based process tools. Pressure sensors, Mass Flow Controllers, Vacuum Pump performance and
Chamber Integrity. Introduced in 1998, the CAT includes several improvements over the VDS.
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Florizel Automatic MFC Tester
The Florizel Automatic MFC Tester is based upon the same theory of operation as the VDS and is used for off-line testing of mass flow controllers. Up to 8 MFC's can be tested in one unattended automatic cycle. Florizel Product Brochure in PDFformat [224k] florizelbrochure.pdf Download: Florizel Operations Manual in PDFformat [3808k] florizelmanual.pdf |
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Vacuum Diagnostic System
The Vacuum Diagnostic System (VDS) is used for the rapid in-situ characterization of the entire gas handling subsystem of vacuum process equipment such as plasma etching systems, chemical vapor deposition systems, etc. The VDS is widely used in the semiconductor industry and has an installed base of over 200 systems worldwide. |
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The Calibration Compensation Module
The Calibration Compensation Module mounts into the control line of an MFC and permits online calibration of analog MFCs. The Calibration Readout Unit is a custom designed meter used to perform the adjustment of the Calibration Compensation Module. |
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BRIDGE Technology is an authorized representative of Lucas Labs
To request further information please call Bridge Technology at (480) 988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com
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