Vacuum Diagnostic System

The Vacuum Diagnostic System is Lucas Labs' original product. Developed in 1988, the VDS is in wide use around the world at most major semiconductor manufacturing facilities. The VDS uses Rate of Rise methodology and applies the gas laws to test test vacuum-based process tools. Pressure sensors, Mass Flow Controllers, Vacuum Pump performance and Chamber Integrity. It also provides some facilities for off line testing of pressure sensors and Mass Flow Controllers.

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