Ultrapol Advance

Ultrapol Advance

All-in-one polishing workstation for microscopy & related high-tech applications

Ultrapol Advance

 

ULTRAPOL advance has been designed to be an all-in-one lapping & polishing workstation for the production of flat surfaces. Advance’s unbeatable combination of advanced control and process features allow for the accurate processing of modern generations of IC’s.

 

Key applications of the technology include:

 

  • Topside electronic de-processing - enabled by the advanced angular control and optical enhancements such as ULTRACOLLIMATOR.

     

  • Backside preparation of packages and wafers, particularly for flip-chips - and rapid global thinning of larger surfaces.

     

  • Cross-sectioning of die and package-level devices.

     

SEM Stub Holder being removed from ULTRAPOL advance for movement to the microscope. 

  

Along with ULTRA TEC’s signature Quick Release interface and workholder technologies, ULTRAPOL advance offers completely new designs for sample loading, oscillation and tilt alignment. 

 

Fast and convenient sample movement between polisher & microscope, coupled with the option of the ULTRACOLLIMATOR optical alignment system, provides reference to the die -- a huge improvement over earlier generation polishers.

 

The system allows recirculating slurry polishing (key for many delayering operations) as well as standard faucet coolant.

 

For aggressive material removal operations (such as the back-thinning of larger flip chips), a ‘Power polish’ mode is incorporated that rotates the sample during processing.

 

The addition of a recirculating pump converts ULTRAPOL advance into a slurry polisher