Ultra Tec ULTRACOLLIMATOR

ULTRACOLLIMATOR

ULTRACOLLIMATOR

ULTRACOLLIMATOR modules provide the ability for producing extremely parallel surfaces on our range polishing products.

 

The system allows for sub-micron parallelism to be attained on the topside of an electronic die being de-processed or backside polished, or for use in aligning the sides of a wafer being processed, to be parallel.

 

System Specifications:

Order Code

 Description
6183.A

ULTRACOLLIMATOR Module- Optical Parallelism alignment system - for use on ASAP-1.

 

Module includes camera (mounted into ASAP-1 base unit), optical alignment flat, machine vision moule, lcd display
6183.M

ULTRACOLLIMATOR Module - Optical Parallelism alignment system - for use on MULTIPOL.

 

Module includes camera, stand with roller bar assembly, optical alignment flat, lcd display
6642.1 Video Caliper, dual axis
6443.1 External Monitor - 13 inch (NTSC)
6245.1 NTSC to PAL Converter 

Image above shows the 6183.M showing the reflected image of the wafer's backside surface

Image above shows the 6183.A module in position on ASAP-1 The ASAP-1 module also incorporates a machine-vision module.

 

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