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ULTRA TEC Precision Polishing Jigs

Ultra Tec Precision Polishing Jigs

The ULTRA TEC Precision Polishing Jigs, allow the user to produce the finest results of sample flatness and parallelism. Precision Jigs work in conjunction with suitable "true flat lapping" machines such as the MULTIPOL range. Precision jigs offer the following features and benefits:

Precise alignment of wafer sample face to the polishing plate

Precise control of loading pressure for optimum results

The jigs provide the means to achieve sample parallelism down to a few seconds of arc (when used with the 6183.1 Autocollimator)

They can hold 2 inch, 3 inch or 4 inch wafers or samples (6 inch capability also available for special applications)

Features:

They incorporate a 'hard stop' to prevent additional material removal after the process end-point.
ULTRA TEC Precision Jigs are fully sealed to prevent abrasives jamming any moving parts during or between processes
The jigs are chemically resistant and capable of polishing with all techniques
Vacuum fixtures are available for 'no-cement' mounting

Ordering Information:

Part No.	Description
6166.2	2 inch Precision Jig, with 'in-situ' micron precision sample removal indicator (d.i.)
6165.2	2 inch Precision Jig, without d.i.
6166.3	3 inch Precision Jig with d.i.
6166.4	4 inch Precision Jig with d.i.
6184.1	Sample Loading Gauge
6183.1	Autocollimator
6245.1	Precision Micromount (with digital indicator)