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PROCESS CHAMBER ASSURANCE TOOL DEDICATED TO IMPROVING PROCESS PERFORMANCE DESIGNED TO TEST MASS FLOW CONTROLLERS, PRESSURE SENSORS, PUMP PERFORMANCE AND CHAMBER INTEGRITY, THE CAT IS USED PRIMARILY FOR: PERFORMANCE MONITORING OF PROCESS TOOL COMPONENTS TO PREVENT UNSCHEDULED DOWN TIME AND MAINTENANCE FINGERPRINTING OF HIGH YIELD PROCESS TOOLS FOR SYSTEM MATCHING WITH LIKE TOOLS BRINGING NEW AND DOWN SYSTEMS ONLINE AND IN SPECIFICATION SETTING A BASELINE STANDARD BEFORE RUNNING A PROCESS For Further Information, please download the Chamber Assurance Tool Brochure in PDF FILE [194K] cat.pdf Also available for download, the Chamber Assurance Tool FAQ in MS Word format [58k] catfaq.doc

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